Advantages

• Function and Performance Advantages

  Currently the industry's highest performance in terms of wafers per hour (WPH) is more than 16,000, which is much higher than the industry average of 10,000~12,000. Measurement accuracy reaches 0.8um, fragmentation rate is stable below 0.05%. Leakage rate < 0.1%. Overkill rate < 0.05%.

• Electromechanical Advantages

  Feeding: two sets of cache mechanism seamlessly connects the feeding; compatible with multi-size flower baskets;Unloading: Bernoulli suspension type unloading device is adopted to ensure a very low fragmentation rate; parallel multiple independent unloading devices; seamless switching of unloading boxes.

  
• Inspection Advantages

  Multi-station inspection of chipping and surface defects around the wafer, using a deep learning model that recognises the silicon material and completes the inspection with high accuracy.

  
• Measurement Advantages

  Dual top and bottom line scanning cameras accurately identify thickness, flatness and line marks. Rejecting hidden cracks and fragments in advance of the inspection stage reduces the burden of subsequent downstream sorting.